Substrate treating apparatus and substrate treating method

A substrate treating apparatus comprising:

• a support configured to include a region at which a substrate is mounted and which includes an electrostatic chuck for sucking the substrate and an outer protective body positioned outside the electrostatic chuck;
• a transfer robot configured to transfer the substrate to the support;
• a measurement unit configured to include a camera imaging the support and the substrate to generate an image information including a laser image in a line shaped irradiated to the support and the substrate, and wherein at least four cameras are positioned to face the center of the support to obtain at least four image information, and an image information with respect to an intercept difference of the substrate and the support is obtained at each of the four image information, an image conversion unit configured to be input with the image information in connection with the camera, and converting an input image information to a digital image information, and a laser irradiation unit configured to irradiate a laser in a line shaped to the support and the substrate;
• and
• a processor of an analysis part configured to control
• a support side reference line detection unit configured to be input with the digital image information in connection with an image conversion unit, and to analyze the support within the digital image information to detect a support side reference line;
• a support center calculation unit configured to be input with the support side reference line in connection with the support side reference line detection unit, and to calculate a center of the support side reference line to calculate a first center coordinate value of the support;
• a substrate side reference line detection unit configured to be input with the digital image information in connection with the image conversion unit, and to analyze the substrate within the digital image information to detect a substrate side reference line;
• a substrate center calculation unit configured to be input with the substrate side reference line in connection with the substrate side reference line detection unit, and to calculate a center of the substrate to calculate a second center coordinate value of the substrate;
• a measurement unit and transfer robot center calculation unit configured to be input with the first center coordinate value of the support in connection with the support center calculation and to be input with the first center coordinate value of the substrate in connection with the substrate center calculation unit, to set the first center coordinate value of the support as a third center coordinate value of the measurement unit, and to set the second center coordinate value of the substrate as a fourth center coordinate value of the transfer robot;
• a first phase value calculation unit configured to be input with the third center coordinate value of the measurement unit and the fourth center coordinate value of the transfer robot in connection with the measurement unit and transfer robot center calculation unit, and to calculate a first phase value with an angle value at which the fourth center coordinate value of the transfer robot is positioned with respect to the third center coordinate value of the measurement unit when the fourth center coordinate value of the transfer robot is changed to a plane coordinate system of the measurement unit;
• a movement record unit configured to move the transfer robot by a first distance so a coordinate value of any one axis is not changed on a plane coordinate system of the transfer robot to record a movement coordinate value on the plane coordinate system of the transfer robot, and to move the fourth center coordinate value of the transfer robot by the first distance on the plane coordinate system of the measurement unit as well to record a virtual coordinate value;
• a second phase value calculation unit configured to be input with the third center coordinate value of the measurement unit and the fourth center coordinate value of the transfer robot in connection with the measurement unit and the center calculation unit of the transfer robot, to be input with the movement coordinate value and the virtual coordinate value in connection with the movement record unit, and to calculate a second phase value with an angle value between a line connecting the fourth center coordinate value of the transfer robot and the movement coordinate value on the plane coordinate system of the measurement unit and a line connecting the fourth center coordinate value of the transfer robot and the virtual coordinate value;
• and
• a teaching coordinate calculation unit configured to generate a teaching coordinate value for teaching the fourth center coordinate value of the transfer robot by applying a trigonometric function formula to the first phase value, and the second phase value, and a distance value on the plane coordinate system of the measurement unit, and
• wherein the teaching coordinate value is determined at the third center coordinate value of the measurement unit, as
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• cos
• ⁡
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• ,
• y
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• 4
• =
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• formula
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• wherein the teaching coordinate value is x4, y4, d1 is a distance value to the fourth center coordinate value of the transfer robot on the plane coordinate system of the measurement unit, θ1 is the first phase value, and θ2 is the second phase value.