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US 12,736,928 B2Granted
Management apparatus, lithography apparatus. management method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorSatoru Itoh
Life of this patent
Estimating the term…
Abstract
A management apparatus includes a learning device. The learning device is configured to, in a case where a reward obtained from a control result of a controlled object by a controller configured to control the controlled object using a neural network, for which a parameter value is decided by reinforcement learning, does not satisfy a predetermined criterion, redecide the parameter value by reinforcement learning.
Claims22
A management apparatus comprising:
- a processor;
- and
- a memory including instructions, which when executed by the processor, cause the management apparatus to perform operations comprising:
- performing a processing sequence of executing processing for a processing target object, wherein a stage is controlled, in accordance with a driving command and an output of a sensor that detects a state of the stage, using a controller comprising a compensator which includes a neural network, for which a parameter value has been decided by reinforcement learning;
- and
- obtaining, after the processing sequence completes, a reward from a control result of the stage in the processing sequence, wherein, in a case where the reward does not satisfy a predetermined criterion, performing the reinforcement learning to redecide the parameter value.
3 more elements
A lithography apparatus for performing processing of transferring a pattern of an Original to a substrate, the apparatus comprising:
- performing a processing sequence of executing processing for the substrate, wherein the processing includes a stage;
- a controller comprising a compensator which includes a neural network for which a parameter value has been decided by reinforcement learning, wherein the stage in the processing sequence is controlled by the controller in accordance with a driving command and an output of a sensor that detects a state of the stage;
- and
- obtaining, after the processing sequence completes, a reward from a control result of the stage in the processing sequence, wherein, in a case where the reward obtained does not satisfy a predetermined criterion, performing the reinforcement learning to redecide the parameter value.
1 more element
A management method comprising:
- a causing step of causing a controller to perform a processing sequence of executing processing for a processing target object, wherein a stage is controlled by the controller in the processing sequence in accordance with a driving command and an output of a sensor that detects a state of the stage, and the controller comprises a compensator which includes a neural network, for which a parameter value has been decided by reinforcement learning;
- an acquiring step of acquiring a control result of the stage in the processing sequence from the controller, after the processing sequence completes;
- and
- a learning step of, in a case where a reward obtained from the control result does not satisfy a predetermined criterion, redeciding the parameter value by reinforcement learning.
1 more element
Dependencies are inferred from the claim text.