Microscope system

A microscope system comprising:

• an incoherent light source;
• an illumination optical system;
• a detection optical system;
• a processor;
• and
• an imager,
• wherein:
• the incoherent light source is a light source configured to emit light that is temporally not coherent,
• the detection optical system is an optical system configured to form an optical image of a sample,
• the imager receives the optical image of the sample formed by the detection optical system,
• in the sample, a plurality of coherent illuminations are simultaneously performed by light emitted from the incoherent light source,
• the coherent illuminations are illumination by light that is spatially coherent,
• a direction in which the sample is irradiated with a light beam is different for each of the coherent illuminations,
• in a pupil plane of the illumination optical system, the respective light beams of the coherent illuminations are located in second regions different from each other,
• the processor:
• obtains a wavefront passing through an estimation sample modeling the sample, by feedforward operation for each of the light beams,
• calculates an intensity distribution at an imaging position of the detection optical system corresponding to the wavefront, for each of the light beams,
• generates a computational image by summing the intensity distributions of the light beams, and
• reconstructs the estimation sample by performing an optimization process to reduce a difference between the computational image and a measurement image output from the imager,
• each of the second regions satisfies the following Condition (6), and
• at least one distance among distances between the two adjacent second regions satisfies the following Condition (7):
• LS′<PS′×10−3 (6)
• 0.05×T′<d′ (7)
• where
• LS′ is an area of the second region (in mm2),
• PS′ is an area of a pupil of the illumination optical system (in mm2),
• d′ is a distance between the two adjacent second regions (in mm), and
• T′ is a diameter of the pupil of the illumination optical system (in mm).