Optical apparatus for laser annealing
AssigneeInternational Business Machines Corporation
InventorsRussell A. Budd, Jason S. Orcutt, Eric Zhang, Yves Martin
Life of this patent
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Abstract
An optical microscope device comprises an optically integrated configuration of components for imaging a target device within a field of view of the optical microscope device, and for laser annealing the target device by generating a laser beam spot pattern from a laser beam received on an optical fiber from a remote laser source, and for controlling a duration of exposure of the laser beam spot pattern for laser annealing the target device.
Claims20
An optical apparatus, comprising:
- a collimator configured to receive an optical beam through an optical fiber coupled to an optical source and to generate a collimated optical beam;
- an optical beam shaper configured to receive the collimated optical beam and to split the collimated optical beam into a plurality of optical beams in accordance with an optical beam pattern configured to laser anneal a target device;
- a first set of optical components configured to receive the plurality of optical beams and to manipulate the plurality of optical beams with respect to the target device;
- and
- an imager configured to generate an image of the target device in a field of view of the optical apparatus.
A system, comprising:
- a control system;
- and
- an optical apparatus comprising:
- a collimator configured to receive an optical beam through an optical fiber coupled to an optical source and to generate a collimated optical beam;
- an optical beam shaper configured to receive the collimated optical beam and to split the collimated optical beam into a plurality of optical beams in accordance with an optical beam pattern configured to laser anneal a target device;
- a set of optical components configured to receive the plurality of optical beams and to manipulate the plurality of optical beams with respect to the target device;
- and
- an imager configured to generate an image of the target device in a field of view of the optical apparatus;
- wherein the control system controls at least a portion of the optical apparatus to enable laser annealing of the target device.
An optical microscope device comprising an optically integrated configuration of components for imaging a target device within a field of view of the optical microscope device, and for laser annealing the target device by generating a laser beam spot pattern from a laser beam received on an optical fiber from a remote laser source, and for controlling a duration of exposure of the laser beam spot pattern for laser annealing the target device.
Dependencies are inferred from the claim text.