Silicon photonic platform, method for forming composite platform and method for forming silicon photonic platform
AssigneeVanguard International Semiconductor Corporation
InventorsMing-Cheng Lo, Shih-Chang Huang, Jui-Chun Chang, Wu-Hsi Lu, Yu-Che Tsai, Shih-Hao Liu, Yen-Shih Ho
Life of this patent
Estimating the term…