Integrated photonics optical gyroscopes with improved sensitivity utilizing high density silicon nitride waveguides
AssigneeAnello Photonics, Inc.
InventorsAvi Feshali, Mario Paniccia, Warren Bruce Jin
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AssigneeAnello Photonics, Inc.
InventorsAvi Feshali, Mario Paniccia, Warren Bruce Jin
Estimating the term…
Aspects of the present disclosure are directed to introducing structural modifications in a waveguide-based optical structure in order to more tightly pack adjacent waveguide turns in the optical structure. The optical structure can be used as the rotational sensing element of an optical gyroscope fabricated on a planar silicon platform as a photonic integrated circuit. Increasing number of turns of a waveguide-based gyroscope coil increases total waveguide length as well as enclosed area of the gyroscope loop, which translates to increased sensitivity to rotational measurement. The structural modifications can be in the form of air-gaps or fluid-filled or metal-filled gaps, or various types of sub-wavelength structures (like gratings or photonic crystals).
A method of manufacturing an integrated photonics chip, the method comprising:
A method of manufacturing an integrated photonics chip, the method comprising:
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