Photonic chips including a structure enabling measurement of the group velocity of light in a photonic component
AssigneeGlobalFoundries U.S. Inc.
InventorsHanyi Ding, Yusheng Bian
Life of this patent
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Abstract
Structures for a photonic chip that enable the measurement of the group velocity of light in a photonic component and methods of forming such structures. The structure comprises a photonic component having an input and an output, a first waveguide core including a first section coupled to the input of the photonic component, and a second waveguide core including a second section coupled to the output of the photonic component. The structure further comprises a first reflector adjacent to the first section of the first waveguide core, and a second reflector adjacent to the second section of the second waveguide core.
Claims20
A structure for a photonic chip, the structure comprising:
- a semiconductor substrate;
- a photonic component having an input and a first output;
- a first waveguide core including a first section coupled to the input of the photonic component;
- a second waveguide core including a second section coupled to the first output of the photonic component;
- a first reflector adjacent to the first section of the first waveguide core;
- and
- a second reflector adjacent to the second section of the second waveguide core,
- wherein the first section of the first waveguide core is disposed between the first reflector and the semiconductor substrate, and the second section of the second waveguide core is disposed between the second reflector and the semiconductor substrate.
A structure for a photonic chip, the structure comprising:
- a semiconductor substrate;
- a photonic component having an input and a first output;
- a first waveguide core including a first section coupled to the input of the photonic component;
- a second waveguide core including a second section coupled to the first output of the photonic component;
- a first reflector adjacent to the first section of the first waveguide core;
- and
- a second reflector adjacent to the second section of the second waveguide core,
- wherein the first reflector is disposed between the first section of the first waveguide core and the semiconductor substrate, and the second reflector is disposed between the second section of the second waveguide core and the semiconductor substrate.
A method of forming a structure for a photonic chip, the method comprising:
- forming a photonic component having an input and an output;
- forming a first waveguide core including a first section coupled to the input of the photonic component;
- forming a second waveguide core including a second section coupled to the output of the photonic component;
- forming a first reflector adjacent to the first section of the first waveguide core;
- and
- forming a second reflector adjacent to the second section of the second waveguide core,
- wherein the first section of the first waveguide core is disposed between the first reflector and a semiconductor substrate, and the second section of the second waveguide core is disposed between the second reflector and the semiconductor substrate.
Dependencies are inferred from the claim text.