Solid-state imaging device, method for manufacturing cover glass, and electronic apparatus

A method for manufacturing a cover glass having a moth-eye structure, the method comprising:

• a step of forming a resin between a microlens array and a cover glass;
• a step of substantially uniformly scattering single particles having a uniform particle size or irregular particle sizes on an upper surface of the cover glass to form a single-particle film;
• and
• a step of forming a plurality of minute protrusions having a uniform size or irregular sizes on the upper surface of the cover glass by performing vapor phase etching on the cover glass using the single-particle film as an etching mask,
• wherein a refractive index of the resin is lower than a refractive index of the cover glass.

An electronic apparatus, comprising:

• an optical system;
• a solid-state imaging device that receives light from the optical system, the solid-state imaging device including:
• a sensor substrate in which a plurality of pixels that receives incident light and converts the incident light into an electric signal is arranged;
• a semiconductor substrate having an upper surface on which the sensor substrate is mounted, the semiconductor substrate being configured to be able to connect the electric signal converted by the pixel to a bump or an external connection terminal disposed on a lower surface;
• a microlens array disposed on an upper surface of the sensor substrate so as to correspond to each of the pixels;
• a resin disposed on an upper surface of the microlens array;
• and
• a cover glass bonded to the microlens array via the resin and having a moth-eye structure formed on a surface of the cover glass,
• wherein a refractive index of the resin is lower than a refractive index of the cover glass;
• and
• a digital signal processor that processes signals received from the solid-state imaging device.