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US 12,736,597 B2Granted
Magnetic sensor having sensing elements on sloped substrate
AssigneeAllegro MicroSystems, LLC
InventorsMaxim Klebanov, Paolo Campiglio, Yen Ting Liu, Samridh Jaiswal, Yu Chun Huang, William P. Taylor, Harianto Wong
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Abstract
Methods and apparatus for a magnetic sensor having a substrate with a major surface and opposing sloped surfaces and magnetoresistive (MR) magnetic field sensing elements coupled in a bridge configuration. At least some of the magnetic field sensing elements are located on the sloped surfaces. In embodiments, the sensor comprises a 3D magnetometer. In some embodiments, the bridge configuration comprises an x-axis bridge, a y-axis bridge, and a z-axis bridge.
Claims34
A sensor, comprising:
- a substrate having a major surface and opposing sloped surfaces;
- and
- magnetoresistive (MR) magnetic field sensing elements coupled in a bridge configuration, wherein at least some of the magnetic field sensing elements are located on the sloped surfaces,
- wherein at least some of the magnetic field sensing elements are located at different depths from the major surface of the substrate for detecting field gradients, and
- wherein the at least some of the magnetic field sensing elements located at different depths from the major surface of the substrate are positioned on respective steps formed in the sloped surfaces.
2 more elements
A method, comprising:
- manipulating a substrate, which forms part of a sensor, to have a major surface and opposing sloped surfaces;
- and
- coupling magnetoresistive (MR) magnetic field sensing elements in a bridge configuration, wherein at least some of the magnetic field sensing elements are located on the sloped surfaces,
- wherein at least some of the magnetic field sensing elements are located at different depths from the major surface of the substrate for detecting field gradients, and
- wherein the at least some of the magnetic field sensing elements located at different depths from the major surface of the substrate are positioned on respective steps formed in the sloped surfaces.
2 more elements
Dependencies are inferred from the claim text.