Parallel dipole line photo-hall system with temperature gradient stage
AssigneeInternational Business Machines Corporation
InventorsOki Gunawan, Josephine Monica, Teodor Krassimirov Todorov
Life of this patent
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Abstract
A testing system includes a magnetic field generator, an electric field generator and a light source. A temperature control assembly includes a sample stage which supports a device under test during exposure to a magnetic field generated by the magnetic field generator, an electric field generated by the electric field generator and photons from the light source. The temperature control assembly generates a temperature gradient across the device under test to enable measurements sensitive to thermal gradient conditions.
Claims23
A testing system, comprising:
- a magnetic field generator;
- an electric field generator;
- a light source;
- and
- a temperature control assembly including a sample stage that supports from below a device under test during exposure of the device under test to a magnetic field generated by the magnetic field generator, an electric field generated by the electric field generator, and photons from the light source, wherein:
- the temperature control assembly generates a temperature gradient across the device under test to enable measurements sensitive to thermal gradient conditions, and
- the sample stage includes edge portions that interface with individually controlled temperature elements that provide differential temperatures resulting in the temperature gradient across the device under test.
A testing system, comprising:
- a parallel line dipole photo-Hall system to measure conductivity, Hall effect, Seebeck effect, and Nernst effect,
- the parallel dipole line photo-Hall system including a temperature control assembly, the temperature control assembly positioned under a device under test, and the temperature control assembly including:
- a sample stage that supports the device under test;
- portions of an intermediary stage, wherein each portion of the portions of the intermediary stage separately supports an end portion of the sample stage;
- and
- temperature controlled stages, wherein each temperature controlled stage of the temperature controlled stages interfaces with the portions of the intermediary stage, and the temperature controlled stages individually control respective end portions of the sample stage to generate a temperature gradient across the device under test.
A testing system, comprising:
- a processor;
- a memory coupled to the processor;
- a magnetic field generator controlled by the processor to generate a two-dimensional magnetic field vector on a device under test;
- a circuit disposed on the device under test to generate an electric field controlled by the processor;
- a light source controlled by the processor to direct light at the device under test;
- and
- a temperature control assembly including a sample stage that supports from below the device under test during exposure of the device under test to the two-dimensional magnetic field vector, the electric field, and photons from the light source, the temperature control assembly being controlled by the processor to generate a temperature gradient across the device under test to enable measurements sensitive to thermal gradient conditions.
A method for measuring a semiconductor device, the method comprising:
- subjecting a device under test to a magnetic field, an electric field, and photons from a light source;
- and
- generating, a temperature differential across the device under test by maintaining temperatures across a sample stage that supports the device under test during the subjecting to enable measurements sensitive to thermal gradient conditions, wherein the sample stage includes edge portions that interface with individually controlled temperature elements that provide differential temperatures resulting in a temperature gradient across the device under test.
Dependencies are inferred from the claim text.