US 12,736,573 B2Granted

Inspecting device and inspecting method

AssigneeIntegral Geometry Science Inc.

InventorsShogo Suzuki, Yutaro Nishimura, Yuki Mima, Kenjiro Kimura, Noriaki Kimura

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Abstract

The inspecting device is an inspecting device that generates a spatial distribution image of an electric field, the inspecting device including: an electric field obtainer that measures the spatial distribution of the electric field at at least one measurement position determined relative to a scanning position, outside an object that emits the electric field; a scanner, by scanning the electric field obtainer, that obtains a measurement result of the spatial distribution of the electric field at a plurality of measurement positions determined relative to a plurality of scanning positions; and a calculator that calculates the spatial distribution of the electric field in a region including a surface of the object using the measurement result of the spatial distribution of the electric field as a boundary condition, and generates the spatial distribution image that shows the spatial distribution that has been calculated.

Claims13

Dependent claims

An inspecting device that generates a spatial distribution image of an electric field, the inspecting device comprising:

an electric field obtainer that measures a spatial distribution of the electric field at at least one measurement position determined relative to a scanning position, outside an object that emits the electric field;
a scanner that obtains, by scanning the electric field obtainer, a measurement result of the spatial distribution of the electric field at a plurality of measurement positions determined relative to a plurality of scanning positions;
and
a calculator that calculates the spatial distribution of the electric field in a region including a surface of the object using the measurement result of the spatial distribution of the electric field as a boundary condition, and generates the spatial distribution image that shows the spatial distribution that has been calculated,
wherein the calculator generates the spatial distribution image according to a following equation:
[
Math
.
1
]
E
i
(
x
,
y
,
z
)
=
1
(
2
⁢
π
)
2
⁢
∫
∫
e
ik
x
⁢
x
+
ik
y
⁢
y
⁢
{
f
⁡
(
k
x
,
k
y
)
⁢
e
k
x
2
+
k
y
2
z
}
⁢
dk
x
⁢
dk
y
where Ei(x, y, z) denotes i component of the electric field at coordinate position (x, y, z);
i denotes x, y, or z;
z denotes a coordinate value in z-direction from the inspecting device to the object;
x denotes a coordinate value in x-direction orthogonal to the z-direction;
y denotes a coordinate value in y-direction orthogonal to the z-direction and the x-direction;
f(kx, ky) denotes a two-dimensional Fourier transform image of Ei(x, y, 0) showing the measurement result of the spatial distribution of the electric field at (x, y, 0) which is a measurement surface;
kx denotes a wave number with respect to x;
and ky denotes a wave number with respect to y.

73 more elements

Dependencies are inferred from the claim text.