Probe pin and probe card
AssigneeJapan Electronic Materials Corporation
InventorKoki Okuma
Life of this patent
Estimating the term…
Abstract
A probe pin includes a low resistance member consisting of a first metal with a first conductivity, and a high resistance member consisting of a second metal with a second conductivity, the second metal having a resistivity higher than that of the low resistance member. The probe pin has a multi layered part between a contact part and a terminal part, where the multi layered part is configured in the order of the high resistance member, a slit of air gap, and the low resistance member, in a first direction different from a buckling direction of the probe pin at the time of inspection of a test object. The low resistance member and the high resistance member are arranged so as not to overlap with each other, when the multi layered part is viewed from the buckling direction.
Claims12
A probe pin having a contact part at one end of a longitudinal direction, for contacting an electrode of a test object, and has a terminal part at the other end of the longitudinal direction, for contacting a circuit board, the probe pin comprising:
- a low resistance member consisting of a first metal with a first conductivity, and
- a high resistance member consisting of a second metal with a second conductivity, the second metal having a resistivity higher than that of the low resistance member,
- wherein the probe pin has a multi layered part between the contact part and the terminal part, where the multi layered part is configured in an order of the high resistance member, a slit of air gap, and the low resistance member, in a first direction different from a buckling direction of the probe pin at the time of inspection of the test object, and
- the low resistance member and the high resistance member are arranged so as not to overlap with each other, when the multi layered part is viewed from the buckling direction.
Dependencies are inferred from the claim text.