US 12,736,557 B2Granted

Self-test architecture for MEMS accelerometer: humidity-proof, fully differential design and full mass control

AssigneeSTMicroelectronics International N.V.

InventorsDaniele De Pascalis, Massimo Orio, Martina Rizzo, Lorenzo Benvenuti, Francesco Rizzini, Nicolo' Manca

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Abstract

An accelerometer includes first and second stator-electrodes associated with a first-rotor, third and fourth stator-electrodes associated with a second-rotor, a first capacitance formed between the first-rotor and first stator-electrode, a second capacitance formed between the first-rotor and second stator-electrode, a third capacitance formed between the second-rotor and third stator-electrode, and a fourth capacitance formed between the second-rotor and fourth stator-electrode. A drive-circuit generates first and second periodic anti-phase stator drive-signals, and third and fourth periodic anti-phase stator drive-signals. To self-test, the drive-circuit applies the first, second, third, and fourth stator drive-signals to the first, second, third, and fourth stator-electrodes, and drives the first and second stator drive-signals with different voltage-swings but drives the third and fourth stator drive-signals with a same voltage-swing. A capacitance-to-voltage converter has a first-input coupled to the first and second capacitances, and a second-input coupled to the third and fourth capacitances.

Claims21

Dependent claims

An accelerometer device, comprising:

a sensor package comprising:
a first rotor;
a first stator electrode and a second stator electrode associated with the first rotor;
a second rotor;
a third stator electrode and a fourth stator electrode associated with the second rotor;
a first capacitance formed between the first rotor and the first stator electrode;
a second capacitance formed between the first rotor and the second stator electrode;
a third capacitance formed between the second rotor and the third stator electrode;
and
a fourth capacitance formed between the second rotor and the fourth stator electrode;
a drive circuit configured to generate:
a first stator drive signal and a second stator drive signal, the first stator drive signal and second stator drive signal being periodic signals in an anti-phase relationship to one another;
and
a third stator drive signal and a fourth stator drive signal, the third stator drive signal and fourth stator drive signal being periodic signals in an anti-phase relationship to one another;
wherein, in a first case of a self-testing mode for electrostatic force on the first rotor, the drive circuit applies the first stator drive signal to the first stator electrode, the second stator drive signal to the second stator electrode, the third stator drive signal to the third stator electrode, and the fourth stator drive signal to the fourth stator electrode, with the first and second stator drive signals being driven with different respective voltage swings, and with the third and fourth stator drive signals being driven with a same voltage swing;
wherein, in a second case of the self-testing mode for electrostatic force on the second rotor, the drive circuit applies the first stator drive signal to the first stator electrode, the second stator drive signal to the second stator electrode, the third stator drive signal to the third stator electrode, and the fourth stator drive signal to the fourth stator electrode, with the first and second stator drive signals being driven with a same voltage swing, and with the third and fourth stator drive signals being driven with different respective voltage swings;
and
a capacitance to voltage converter having a first input coupled to the first capacitance and the second capacitance, and a second input coupled to the third capacitance and the fourth capacitance.

15 more elements

A method of operating an accelerometer device, the method comprising:

generating a first stator drive signal and a second stator drive signal, the first stator drive signal and second stator drive signal being periodic signals in an anti-phase relationship to one another;
generating a third stator drive signal and a fourth stator drive signal, the third stator drive signal and fourth stator drive signal being periodic signals in an anti-phase relationship to one another;
in a first case of a self-testing mode, applying the first stator drive signal to a first stator electrode, the second stator drive signal to a second stator electrode, the third stator drive signal to a third stator electrode, and the fourth stator drive signal to a fourth stator electrode, with the first and second stator drive signals being driven with different respective voltage swings, and with the third and fourth stator drive signals being driven with a same voltage swing;
and
in a second case of the self-testing mode, applying the first stator drive signal to the first stator electrode, the second stator drive signal to the second stator electrode, the third stator drive signal to the third stator electrode, and the fourth stator drive signal to the fourth stator electrode, with the first and second stator drive signals being driven with a same voltage swing, and with the third and fourth stator drive signals being driven with different respective voltage swings.

2 more elements

An accelerometer device, comprising:

a sensor package comprising:
a first rotor;
first and second stator electrodes associated with the first rotor;
a second rotor;
third and fourth stator electrodes associated with the second rotor;
and
first, second, third, and fourth capacitances formed between the first and second rotors and their respective first, second, third, and fourth stator electrodes;
a drive circuit generating:
first and second stator drive signals, being periodic and in an anti-phase relationship;
and
third and fourth stator drive signals, being periodic and in an anti-phase relationship;
wherein in a first self-testing mode, the drive circuit applies the first, second, third, and fourth stator drive signals to the first, second, third, and fourth stator electrodes, with the first and second stator drive signals having different voltage swings, and the third and fourth stator drive signals having a same voltage swing;
wherein in a second self-testing mode, the drive circuit applies the first, second, third, and fourth stator drive signals to the first, second, third, and fourth stator electrodes, with the first and second stator drive signals having the same voltage swing, and the third and fourth stator drive signals having different voltage swings;
and
a capacitance to voltage converter with inputs coupled to the first, second, third, and fourth capacitances.

12 more elements

Dependencies are inferred from the claim text.