Layered detection method and layered detection system

A layered detection system, comprising:

• a terahertz electromagnetic wave generator, configured to generate a terahertz emission electromagnetic wave, and emit the terahertz emission electromagnetic wave at any angle to a solid material;
• a terahertz electromagnetic wave receiver, configured to detect a plurality of terahertz emission electromagnetic waves reflected or transmitted after the terahertz emission electromagnetic wave is incident on the solid material and passes through an entire thickness of the solid material in a first direction;
• and
• a detection device, coupled to the terahertz electromagnetic wave generator and the terahertz electromagnetic wave receiver, configured to measure and analyze a plurality of characteristic signals according to the terahertz emission electromagnetic wave and the plurality of terahertz reception electromagnetic waves, define a specific depth in the solid material as an interface, obtain an electric field intensity of an incident electromagnetic wave and a reflected or transmitted electromagnetic wave corresponding to the interface and an angle formed with a normal to the interface, and calculate complex refractive indices on both sides of the interface by using Fresnel equations, so as to distinguish the solid material along the first direction into a plurality of parallel layers, and determine a plurality of characteristics of the plurality of layers, and to determine at least one defect information of each layer of the plurality of layers according to the plurality of characteristics of the plurality of layers.