Vacuum sealing integrity of cryogenic electrostatic chucks using non-contact surface temperature measuring probes

A substrate support assembly, comprising:

• an electrostatic chuck and one or more plates;
• a probe assembly disposed within the electrostatic chuck, the probe assembly extending through one or more of the one or more plates, the probe assembly comprising:
• an optical probe sensor;
• an optical fiber coupled to the optical probe sensor;
• and
• an insulating sheath surrounding the optical fiber;
• and
• a probe target in contact with the electrostatic chuck and a distance away from a tip of the optical fiber, the probe target comprising a coating of photoluminescent material.

A substrate support assembly, comprising:

• an electrostatic chuck and one or more plates;
• a probe assembly disposed within the substrate support assembly and extending through one or more of the one or more plates, the probe assembly comprising:
• an optical probe sensor;
• an optical fiber coupled to the optical probe sensor;
• an insulating sheath surrounding the optical fiber;
• a housing disposed within the electrostatic chuck, the housing comprising:
• a seal disposed in a seal recess of the housing;
• and
• a cavity within the housing, the optical fiber and insulating sheath disposed through the cavity;
• and
• a sealant disposed within the cavity surrounding the insulating sheath;
• and
• a probe target in contact with a bottom surface of the electrostatic chuck and a distance away from a tip of the optical fiber, the probe target comprising a coating of photoluminescent material.