Bolometer-type infrared detector and method of manufacturing the same
AssigneeNEC Corporation
InventorTomo Tanaka
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AssigneeNEC Corporation
InventorTomo Tanaka
Estimating the term…
To provide a bolometer-type infrared detector whose resistance value is not easily influenced by the external environment and which operates stably, and a method for manufacturing the same. A bolometer-type infrared detector having a laminated structure in which a first protective film, a light reflective film and a second protective film are provided in this order on a heat-sensitive element, wherein the first protective film is made of at least one selected from the group consisting of a metal oxide film, a metal nitride film, a polyimide, an acrylic resin and a fluororesin; the light reflective film is a metal film; and the second protective film is made of at least one selected from the group consisting of a metal oxide film, a metal nitride film, a polyimide, an acrylic resin, and a fluororesin.
A bolometer-type infrared detector having a laminated structure in which a first protective film, a light reflective film and a second protective film are provided in this order on a heat-sensitive element, wherein
A method for manufacturing a bolometer-type infrared detector comprising:
Dependencies are inferred from the claim text.