Valve device

A valve device comprising:

• a body that includes flow paths, a recessed portion where the flow paths are opened, and a valve chamber with which the flow paths communicate at the recessed portion;
• an inner disk that is accommodated in the recessed portion and sections the flow paths until the flow paths reach the valve chamber with an inner peripheral edge portion and an outer peripheral edge portion;
• a diaphragm that blocks or establishes communication of the flow paths in the valve chamber;
• a first annular surface that is formed at the inner peripheral edge portion on a side facing the valve chamber;
• a second annular surface that is formed at the inner peripheral edge portion on a side opposite to the first annular surface and is supported by a bottom surface of the recessed portion;
• a first sealing portion configured as a valve seat body, which is held by the first annular surface, on and from which the diaphragm is seated and separated in accordance with the blocking or the communication of the flow paths;
• and
• a second sealing portion that is disposed between the second annular surface and the bottom surface of the recessed portion,
• wherein the inner disk is configured of
• a first inner disk that is accommodated in the recessed portion and sections the flow paths until the flow paths reach the valve chamber with the inner peripheral edge portion and the outer peripheral edge portion, and
• a second inner disk that is detachably disposed on an inner side of the inner peripheral edge portion in a radial direction such that the second inner disk is movable in a thickness direction of the first inner disk,
• the first annular surface is formed at the second inner disk on a side facing the valve chamber,
• the second annular surface is formed at the second inner disk on a side opposite to the first annular surface and is supported by the bottom surface of the recessed portion, and
• the valve device further comprises a pair of regulating portions that are formed on an inner circumferential surface of the inner peripheral edge portion and an outer circumferential surface of the second inner disk and regulate movement of the second inner disk to a side of the valve chamber in the thickness direction by abutting on each other,
• wherein the second sealing portion is attached to the second annular surface with an adhesive.