Multi-layer and multi-ringed seals for preventing permeation and leak-by of fluid
AssigneeLam Research Corporation
InventorsKarl Frederick Leeser, Bradley Taylor Streng, Nick Ray Linebarger, Jr.
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AssigneeLam Research Corporation
InventorsKarl Frederick Leeser, Bradley Taylor Streng, Nick Ray Linebarger, Jr.
Estimating the term…
A seal to prevent fluid through a first interface between the seal and a first body, includes first and second band members and a bridge member. The first band member defines a first band seal surface on first side of the first band member. The first band member is configured to provide a first fluid seal with the first body when compressed to the first body. The second band member defines a second band seal surface on a first side of the second band member. The second band member is configured to provide a second fluid seal with the first body when compressed to the first body. The first band member and the second band member at least partially define a cavity between the first band member and the second band member. The bridge member extends through the cavity and connects the first band member to the second band member.
A system for evacuating a cavity, the system comprising:
A system comprising:
A system comprising:
A system comprising:
Dependencies are inferred from the claim text.