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US 12,735,802 B2Granted
Quartz glass crucible, manufacturing method thereof, and manufacturing method of silicon single crystal
AssigneeSumco Corporation
InventorsMasami Ohara, Hiroshi Kishi, Eriko Kitahara, Hideki Fujiwara
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Abstract
A quartz glass crucible includes a crucible base body including silica glass and a coating film containing a crystallization accelerator and formed on the inner surface of the crucible base body. The average carbon concentration in the coating film, and the crucible base body within a range of 0 μm or more and 300 μm or less in depth from the inner surface of the crucible base body is 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less.
Claims7
A quartz glass crucible comprising:
- a crucible base body consisting of silica glass;
- and
- a coating film containing a crystallization accelerator and formed on an inner surface of the crucible base body,
- wherein:
- the coating film has an average carbon concentration of 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less,
- the crucible base body at a depth from 0 μm to 300 μm from the inner surface of the crucible base body has an average carbon concentration of 1.0×1012 atoms/cc or more and 3.0×1019 atoms/cc or less,
- a variation coefficient (σ/AVERAGE) of a carbon concentration in the coating film at five points on a bottom of the crucible base body is 1.1 or less, and
- the five points are determined as:
- a first measurement point that is a center of the bottom,
- a second measurement point that is a position shifted by 0.08 to 0.7 times a radius in a radial direction of the crucible base body from the first measurement point,
- a third measurement point that is a position rotated 90° clockwise in a circumferential direction from the second measurement point,
- a fourth measurement point is a position rotated 90° clockwise in the circumferential direction from the third measurement point, and
- a fifth measurement point that is a position rotated 90° clockwise in the circumferential direction from the fourth measurement point.
10 more elements
Dependencies are inferred from the claim text.