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US 12,735,377 B2Granted
Spin on metal-organic formulations
AssigneeMerck Electronics KGAA
InventorsOrest Polishchuk, Takanori Kudo
Life of this patent
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Abstract
The disclosed and claimed subject matter relates to spin-on metal-organic formulations that include zirconium.
Claims24
A formulation comprising:
- (i) zirconium propionate (ZPP);
- (ii) one or more etch resistance modulator additive comprising one or more of
- wherein
- R11 is hydrogen or methyl;
- and
- L3 is a direct bond, a substituted or unsubstituted C1-3 alkyl, or a substituted or unsubstituted C7-16 aralkyl;
- (iii) one or more solvents,
- (iv) one or more surfactant;
- and
- (v) one or more water resistivity enhancer.
7 more elements
Dependencies are inferred from the claim text.