Grinding apparatus
AssigneeTokyo Electron Limited
InventorMunehisa Kodama
Life of this patent
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Abstract
A grinding apparatus includes a chuck, a housing, a tool driving unit, a nozzle, a sensor and a sensor cover. The chuck is configured to hold a substrate. The housing accommodates the chuck therein. The tool driving unit is configured to drive a grinding tool pressed against the substrate within the housing. The nozzle is configured to supply a grinding liquid to the substrate within the housing. The sensor is disposed at an inside of the housing and is configured to detect a liquid level of a liquid collected within the housing. The sensor cover is located between the chuck and the sensor.
Claims9
A grinding apparatus, comprising:
- a chuck configured to hold a substrate;
- a housing accommodating the chuck therein, the housing comprising a top panel located above the chuck, and a side panel located on a side of the chuck;
- a case forming an outer surface of the grinding apparatus, and accommodating the housing therein;
- a tool driving unit configured to drive a grinding tool pressed against the substrate within the housing, the tool driving unit including a moving unit to which the grinding tool is mounted, and an elevating unit configured to move the moving unit up and down;
- a nozzle configured to supply a grinding liquid to the substrate within the housing;
- a sensor, disposed at an inside of the housing, configured to detect a liquid level of a liquid collected within the housing;
- and
- a sensor cover located between the chuck and the sensor,
- wherein an insertion opening for the moving unit is formed at the top panel which is located above the side panel,
- wherein the housing includes multiple side panels located on a side of the chuck,
- wherein the sensor is located at a corner between the multiple side panels,
- wherein when viewed from above, the sensor cover comprises a slanting plate inclined with respect to each of the multiple side panels forming the corner, and
- wherein the sensor is located in a space surrounded by the multiple side panels and the slanting plate.
A grinding apparatus, comprising:
- a chuck configured to hold a substrate;
- a housing accommodating the chuck therein;
- a tool driving unit configured to drive a grinding tool pressed against the substrate within the housing;
- a nozzle configured to supply a grinding liquid to the substrate within the housing;
- a sensor, disposed at an inside of the housing, configured to detect a liquid level of a liquid collected within the housing;
- and
- a sensor cover located between the chuck and the sensor,
- wherein the housing includes multiple side panels located on a side of the chuck,
- wherein the sensor is located at a corner between the multiple side panels,
- wherein when viewed from above, the sensor cover comprises a slanting plate inclined with respect to each of the multiple side panels forming the corner, and
- wherein the sensor is located in a space surrounded by the multiple side panels and the slanting plate.
Dependencies are inferred from the claim text.