Processing apparatus, and installing method of processing tool of processing apparatus
AssigneeTokyo Electron Limited
InventorsYasutaka Mizomoto, Susumu Hayakawa
Life of this patent
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Abstract
A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover includes an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof. The processing apparatus further includes a shutter configured to open or close the entrance opening of the exterior cover.
Claims3
An installing method of a processing tool of a processing apparatus equipped with a holder configured to hold a processing target object, a processing mechanism to which the processing tool configured to process the processing target object held by the holder is installed in a replaceable manner, and an exterior cover accommodating therein the holder and the processing mechanism, the installing method comprising:
- instructing, by the processing apparatus, a replacing apparatus to install the processing tool;
- detecting, by the processing apparatus, an arrival of the replacing apparatus at a set position outside the exterior cover;
- and
- opening a shutter, which is configured to open or close an entrance opening of the exterior cover, to allow the replacing apparatus to advance to an inside of the exterior cover from an outside thereof through the entrance opening of the exterior cover,
- wherein the processing mechanism comprises a flange to which the processing tool is mounted, a spindle shaft including the flange at a lower end thereof, and a spindle motor configured to rotate the spindle shaft,
- wherein the replacing apparatus comprises:
- a replacing mechanism configured to install the processing tool to the processing mechanism, or separate the processing tool from the processing mechanism;
- and
- a multi-joint arm configured to move the replacing mechanism;
- wherein the replacing mechanism comprises:
- a support member configured to hold the processing tool from below;
- a first rotator member configured to rotate the processing tool and the flange simultaneously by rotating the support member;
- and
- a manipulating mechanism configured to tighten or loosen a fastener that fastens the processing tool to the flange of the processing mechanism, and
- wherein, in a state that a rotation of the support member is stopped by the first rotary rotator member, the manipulating mechanism is configured to tighten the fastener to fasten the processing tool.
Dependencies are inferred from the claim text.