Holder plate for negative pressure chucking, holder device for negative pressure chucking, and de-bonding station
AssigneeSky Tech Inc.
InventorsJung-Hua Chang, Ching-Liang Yi, Ta-Hao Kuo
Life of this patent
Estimating the term…
Abstract
A holder plate for negative pressure chucking, in which the holder plate is plate body comprising a holding surface and a bottom surface. Air passages are formed inside the holder plate and communicates the holding surface and the bottom surface, and the air passages form a plurality of ventilation openings on the holding surface. A total area of an opening of the ventilation openings in the holding surface is less than 50% of the area of the holder plate and greater than 0.2% of the area of the holder plate. The thermal conductivity of the holder plate is greater than 100 W/mK; wherein W is watts, m is meters, and K is the absolute temperature scale.
Claims8
A holder plate for negative pressure chucking, in which the holder plate is plate body comprising a holding surface and a bottom surface, and wherein:
- the holder plate is made of a porous medium;
- air passages are formed inside the holder plate by interconnecting at least partial voids of the porous medium and communicates the holding surface and the bottom surface, and the air passages form a plurality of ventilation openings on the holding surface;
- wherein a total area of an opening of the ventilation openings in the holding surface is less than 50% of the area of the holder plate and greater than 0.2% of the area of the holder plate;
- and
- the thermal conductivity of the holder plate is greater than 100 W/mK;
- wherein W is watts, m is meters, and K is the absolute temperature scale.
A holder plate for negative pressure chucking, in which the holder plate is plate body comprising a holding surface and a bottom surface, and wherein:
- the holder plate is made of air impermeable material, and the holder plate further includes a plurality of through holes and a plurality of tranches, the trenches extend on the holding surface and at least extend to one of the through holes, wherein the through holes and the trenches form the ventilation openings on the holding surface;
- air passages are formed inside the holder plate and communicates the holding surface and the bottom surface, and the air passages form a plurality of ventilation openings on the holding surface, wherein the through holes communicate the holding surface and the bottom surface as the air passages, and the through holes form the plurality of ventilation openings on the holding surface;
- wherein a total area of an opening of the ventilation openings in the holding surface is less than 50% of the area of the holder plate and greater than 0.2% of the area of the holder plate;
- and
- the thermal conductivity of the holder plate is greater than 100 W/mK;
- wherein W is watts, m is meters, and K is the absolute temperature scale.
Dependencies are inferred from the claim text.