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US 12,734,612 B2Granted
Processing system and measurement member
AssigneeNikon Corporation
InventorsShigeki Egami, Yosuke Tatsuzaki
Life of this patent
Estimating the term…
Abstract
A processing system is a processing system that is configured to process an object by irradiating the object with an energy beam, and includes: a placing apparatus on which the object is placed; an irradiation apparatus that is configured to irradiate the object with the energy beam; and a light reception apparatus that includes: a beam passing member having an attenuation area in which the energy beam is attenuated and a plurality of passing areas through each of which the energy beam is allowed to pass; and a light reception part that is configured to optically receive the energy beam that has passed through the plurality of passing areas.
Claims24
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- and
- a cover member that is attached to the light reception apparatus and that covers the passing area and is configured to separate a first space that includes the light reception part from a second space through which the energy beam passes before reaching the first space.
5 more elements
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- and
- a cover member that covers the passing area,
- the cover member is movable between a first position at which the passing area is covered and a second position at which the passing area is not covered,
- the beam passing member is disposed in a hole formed in the placing apparatus,
- the cover member and the beam passing member form a space in the hole when the cover member is located at the first position, and
- the processing system further comprises a gas supply apparatus that is configured to supply a gas into the space in the hole.
9 more elements
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- a cover member that covers the passing area;
- and
- a measurement apparatus that is configured to measure the object by a measurement beam,
- the beam passing member includes a mark that is measured by the measurement apparatus, and
- the cover member covers the mark.
8 more elements
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- a cover member that covers the passing area;
- a measurement apparatus that is configured to measure at least one of the object and at least a part of the light reception apparatus;
- a movement apparatus that is configured to move the placing apparatus;
- an obtaining apparatus that is configured to obtain an information related to a position of the placing apparatus;
- and
- a control apparatus that is configured to control the movement apparatus,
- at least a part of the light reception apparatus is disposed in the placing apparatus,
- the control apparatus is configured to:
- move the placing apparatus to a measurement allowable position at which the measurement apparatus is allowed to measure at least a part of the light reception apparatus;
- obtain, by using the obtaining apparatus, a measurement position information related to the position of the placing apparatus that has moved to the measurement allowable position;
- and
- control the position of the placing apparatus based on the measurement position information.
15 more elements
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- a cover member that covers the passing area;
- a measurement apparatus that is configured to measure at least one of the object and at least a part of the light reception apparatus;
- a movement apparatus that is configured to move the placing apparatus;
- an obtaining apparatus that is configured to obtain an information related to the position of the placing apparatus;
- and
- a control apparatus that is configured to control the movement apparatus,
- at least a part of the light reception apparatus is disposed in the placing apparatus,
- the control apparatus is configured to:
- move the placing apparatus to a irradiation allowable position at which the irradiation apparatus is allowed to irradiate at least a part of the light reception apparatus with the energy beam;
- obtain, by using the obtaining apparatus, an irradiation position information related to the position of the placing apparatus that has moved to the irradiation allowable position;
- and
- control the position of the placing apparatus based on the irradiation position information.
15 more elements
A processing system that is configured to process an object by irradiating the object with an energy beam, wherein
- the processing system comprises:
- a placing apparatus on which the object is placed;
- an irradiation apparatus that is configured to irradiate the object with the energy beam;
- a light reception apparatus that is disposed on the placing apparatus and includes:
- a beam passing member having an attenuation area in which the energy beam is attenuated and a passing area through which the energy beam is allowed to pass;
- and a light reception part that is configured to optically receive the energy beam that has passed through the passing area;
- and
- a cover member that is provided on the placing apparatus and that covers the passing area and is configured to separate a first space that includes the light reception part from a second space through which the energy beam passes.
5 more elements
Dependencies are inferred from the claim text.