Joining apparatus

A joining apparatus that connects a first metal layer and a second metal layer formed on respective joint surfaces of two joining targets to each other through joining using laser light, thereby joining the joint surfaces of the two joining targets to each other, the joining apparatus comprising:

• a first chuck unit including a suction surface to which a back surface of one of the two joining targets is to be sucked, and a plurality of through holes formed at the suction surface and through each of which the laser light is to pass;
• a second chuck unit including a suction surface to which a back surface of the other of the two joining targets is to be sucked;
• an alignment mechanism that adjusts the positions of the two joining targets relative to each other in such a manner as to locate the first metal layer and the second metal layer in a facing relationship while the two joining targets are sucked to the first chuck unit and the second chuck unit;
• a plurality of pressure-contact units each having a pressure-contact surface and being movable to a protruding position relative to the second chuck unit to locally contact and apply pressure to the back surface of the other of the two joining targets, the plurality of pressure contact units provided at places of the second chuck unit facing the through holes;
• a laser light source that emits the laser light;
• and
• a controller, after adjustment of the relative positions by the alignment mechanism, the controller causing the pressure-contact units to apply pressure to local parts overlapping the through holes respectively on the back surface of the other of the two joining targets while the first metal layer and the second metal layer contact each other, and while maintaining the resultant state, applying the laser light to a place of contact between the first metal layer and the second metal layer through the through hole corresponding to each of the local parts.

A joining apparatus that connects a first metal layer and a second metal layer formed on respective joint surfaces of two joining targets to each other through joining using laser light, thereby joining the joint surfaces of the two joining targets to each other, the joining apparatus comprising:

• a table having permeability to the laser light and including a suction surface to which a back surface of one of the two joining targets is to be sucked;
• a diaphragm comprising a flexible membrane configured to deform in conformity with a back surface of the other of the two joining targets and to apply pressure uniformly thereto, the diaphragm having a suction surface to which a back surface of the other of the two joining targets is to be sucked;
• an alignment mechanism that adjusts the positions of the two joining targets relative to each other in such a manner as to locate the first metal layer and the second metal layer in a facing relationship while the two joining targets are sucked to the table and the diaphragm;
• a laser light source that emits the laser light;
• and
• a controller, after adjustment of the relative positions by the alignment mechanism, the controller applying pressure to the back surface of the other of the two joining targets using the diaphragm while the first metal layer and the second metal layer contact each other, and while maintaining the resultant state, applying the laser light to a place of contact between the first metal layer and the second metal layer through the table.