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US 12,734,507 B2Granted
Method for preparing carbon nanotube-producing catalyst
AssigneeLG Chem, Ltd.
InventorsEui Tae Kim, Eun Jeong Lee, Ki Hwan Kim, Eu Gene Oh, Sung Eun Park, Geun Sung Lee
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Abstract
The present invention relates to a method for preparing a carbon nanotube-producing catalyst using chemical vapor deposition method. Using the above preparation method, a uniform and thin coating layer can be formed even on the surface of a support having a high-specific-surface-area having a 3D structure, and high-quality and low-diameter carbon nanotubes can be produced using the catalyst prepared through this method.
Claims10
A method for preparing a carbon nanotube-producing catalyst, the method comprising:
- loading a support on a substrate in a chamber (S1);
- and
- forming a catalyst layer on a surface of the support using chemical vapor deposition (S2),
- wherein, (S2) comprises;
- pulsing a catalyst precursor gas into the chamber (S2-1), and
- purging the inside of the chamber with an inert gas (S2-2), and sequentially repeating S2-1 and S2-2 1 to 40 times.
3 more elements
Dependencies are inferred from the claim text.