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US 12,733,453 B2Granted
Susceptor assembly thermal break and methods for cooling a susceptor assembly
AssigneeApplied Materials, Inc.
InventorsVijayabhaskara Venkatagiriyappa, Laxman Vitthalrao Deshmukh, Chau T. Nguyen
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Abstract
Apparatus and methods for cooling down a susceptor assembly are described. A heat exchange passage in a susceptor assembly thermal break transfers heat from processing gases that flow through the susceptor assembly to a cooling jacket and cools down the susceptor assembly and associated hardware.
Claims14
A susceptor assembly comprising:
- the a susceptor assembly thermal break including a body, a channel through the body and a heat exchange passage;
- a cooling jacket having a first end and a second end defining a length of the cooling jacket, the first end of the cooling jacket having a vacuum inlet opening in a first end face, the second end of the cooling jacket having a vacuum outlet opening in a second end face, the first end of the cooling jacket is configured to removably receive the second end of the susceptor assembly thermal break;
- a cooling jacket channel extending through the length of the cooling jacket from the first end of the cooling jacket to the second end of the cooling jacket, the cooling jacket channel aligned with the channel extending through the body of the susceptor assembly thermal break;
- an inlet cooling passage having an inlet cooling passage outlet opening in the first end of the cooling jacket, the inlet cooling passage in fluid communication with the inlet passage of the heat exchange passage of the susceptor assembly thermal break;
- and an outlet cooling passage having an outlet cooling passage inlet opening in the first end of the cooling jacket, the outlet cooling passage in fluid communication with the outlet passage of the heat exchange passage of the susceptor assembly thermal break.
2 more elements
Dependencies are inferred from the claim text.