Wafer chuck having multiple simultaneously actuated wafer contact fingers for handling a wafer

A wafer chuck for handling a wafer in a wafer process device, the wafer chuck comprising:

• a fixing device for holding the wafer, wherein the fixing device comprises:
• a free space for receiving the wafer;
• and
• a holder with multiple wafer contact fingers for the wafer, the multiple wafer contact fingers are each movable relative to the holder, and
• an actuation device for actuating the multiple wafer contact fingers;
• wherein the multiple wafer contact fingers are arranged annularly in one plane around the free space for the wafer,
• the multiple wafer contact fingers are each pivotably mounted on the holder about a pivot axis so as to be movable in the direction of the free space to hold the wafer and away from the free space to release the wafer,
• the multiple wafer contacts fingers are each elongated about the pivot axis;
• and
• when the actuation device is actuated, the wafer contact fingers are moved simultaneously.