System and method for automated wafer carrier handling

A system for automated wafer carrier handling, comprising:

• storage racks, spaced apart from one another in a first direction, and each defining multiple compartments for wafer carrier storage, each of the storage racks comprising a first column and a second column arranged in sequence along the first direction, and each of the first and second columns extending along a height direction of the storage racks, wherein a standby position is located inside a space interposed between the first and second columns, and is adapted to buffer a wafer carrier awaiting transfer to a semiconductor processing tool external to the storage racks;
• first moving mechanisms, respectively disposed in one of the storage racks, and each adapted to transfer a wafer carrier from one of the compartments in one of the storage racks to the standby position in the one of the storage racks;
• and
• a second moving mechanism, comprising a first track extending between the space interposed between the first and second columns of a first storage rack of the storage racks and a first load port of the semiconductor processing tool along a second direction different from the first direction, wherein the first track is assembled onto a top of the first storage rack and between the standby position and the top of the first storage rack in the height direction.

An operation method for automated wafer carrier handling, comprising:

• using a controller to operate a first moving mechanism for moving a wafer carrier holding unprocessed wafers in a storage rack to a standby position, wherein:
• the storage rack comprises a first column and a second column arranged along a lateral direction, and a space interposed between the first and second columns along the lateral direction,
• the first and second columns comprise compartments,
• the space comprises a first position, the standby position, and a second position arranged in sequence along a height direction, and
• the first moving mechanism is disposed inside the storage rack;
• and
• using the controller to operate a second moving mechanism for transferring the wafer carrier holding the unprocessed wafers to a load port of a semiconductor processing tool from the standby position, wherein the load port is external to the storage rack.