Substrate processing system and substrate transfer method

A substrate processing system, comprising:

• a plurality of modules including a processing chamber in which a substrate is held and processing is performed on the substrate;
• a transfer chamber to which the plurality of modules are connected;
• a substrate transfer device provided in the transfer chamber, for transferring the substrate to the plurality of modules and taking out the substrate from the plurality of modules;
• and
• a controller,
• wherein the substrate transfer device includes a first transfer unit, a second transfer unit and a third transfer unit, each of which places thereon the substrate and is linearly movable and swivelable independently and freely over a surface of the transfer chamber without being restricted to a predetermined drive line, and
• the controller controls the substrate transfer device such that a substrate replacement operation is performed from one module to another module among the plurality of modules by moving the first transfer unit, the second transfer unit and the third transfer unit,
• wherein the substrate processing system further comprises an openable/closable gate valve provided between the transfer chamber and each of the plurality of modules,
• wherein the controller controls the substrate transfer device such that at least one transfer unit moves simultaneously with an opening and closing of the gate valve,
• wherein when as an initial state a first substrate exists in said one module, a second substrate exists in said another module, a third substrate exists on the second transfer unit, and the gate valve of said one module is opened, the controller controls the substrate transfer device to perform as a main operation:
• taking out the first substrate which exists in said one module by the first transfer unit;
• subsequently transferring the third substrate on the second transfer unit to said one module;
• subsequently closing the gate valve of said one module and, simultaneously, moving the at least one transfer unit;
• opening the gate valve of said another module and, simultaneously, moving the at least one transfer unit;
• subsequently taking out the second substrate in said another module by the third transfer unit;
• and
• subsequently transferring the first substrate to said another module by the first transfer unit.

A substrate transfer method for performing a substrate replacement operation from one module to another module among a plurality of modules in a substrate processing system, the substrate processing system comprising the plurality of modules including a processing chamber in which a substrate is held and processing is performed on the substrate, a transfer chamber to which the plurality of modules are connected, a substrate transfer device provided in the transfer chamber for transferring the substrate to the plurality of modules and taking out the substrate from the plurality of modules, and an openable/closable gate valve provided between the transfer chamber and each of the plurality of modules,

• wherein the substrate transfer device includes a first transfer unit, a second transfer unit, and a third transfer unit, each of which places thereon the substrate and is linearly movable and swivelable independently and freely over a surface of the transfer chamber without being restricted to a predetermined drive line,
• wherein the substrate transfer method performs a substrate replacement operation from one module to another module among the plurality of modules by moving the first transfer unit, the second transfer unit and the third transfer unit,
• the substrate transfer method moves the substrate transfer device such that at least one transfer unit moves simultaneously with an opening and closing of the gate valve,
• the substrate transfer method comprising as a main operation:
• when as an initial state a first substrate exists in said one module, a second substrate exists in said another module, and a third substrate exists on the second transfer unit,
• taking out the first substrate which exists in said one module by the first transfer unit;
• subsequently transferring the third substrate on the second transfer unit to said one module;
• subsequently taking out the second substrate in said another module by the third transfer unit;
• and
• subsequently transferring the first substrate to said another module by the first transfer unit.