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US 12,733,429 B2Granted
Plug, method of manufacturing plug, and member for semiconductor manufacturing apparatus
AssigneeNGK Insulators, Ltd.
InventorsHideaki Hashimoto, Masashi Ono, Michihiro Ashida
Life of this patent
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Abstract
A plug includes a plug body, a spiral gas flow path that is provided in the plug body and that extends from a lower surface of the plug body to an upper surface, and at least one branch path that branches from a position on the spiral gas flow path and that opens on an outer circumferential surface of the plug body or that is in communication with another spiral gas flow path that differs from the spiral gas flow path and that extends from a lower surface of the plug body to an upper surface.
Claims8
A plug comprising:
- a plug body;
- a spiral gas flow path that is provided in the plug body and that extends from a lower surface of the plug body to an upper surface;
- and
- at least one branch path that branches from a position on the spiral gas flow path and that opens on an outer circumferential surface of the plug body or that is in communication with another spiral gas flow path that differs from the spiral gas flow path and that extends from a lower surface of the plug body to an upper surface.
1 more element
Dependencies are inferred from the claim text.