Circuit manufacturing method and superconducting circuit
AssigneeNEC Corporation
InventorsTomohiro Yamaji, Tsuyoshi Yamamoto
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AssigneeNEC Corporation
InventorsTomohiro Yamaji, Tsuyoshi Yamamoto
Estimating the term…
A circuit manufacturing method according to the present disclosure is a circuit manufacturing method by deposition, comprising performing first deposition for forming a first superconductor layer, oxidizing a surface of the first superconductor layer to form an oxide film, performing second deposition for forming a second superconductor layer, whereby a circuit in which Josephson junctions are aligned is generated. A mask includes two opening parts and an odd number of first-type opening parts. The width of a first-type opening part has such a length that the area of a Josephson junction formed based on the first superconductor layer and the second superconductor layer derived from the first-type opening part becomes larger than the area of a Josephson junction formed based on the first superconductor layer and the second superconductor layer derived from the two opening parts that are adjacent to each other.
A superconducting circuit comprising:
Dependencies are inferred from the claim text.