Infrared radiation source

An IR (infrared) radiation source comprising:

• a sealed cavity structure enclosing a vacuum chamber having a low atmospheric pressure, wherein the sealed cavity structure comprises a thermally and electrically insulating material enclosing the vacuum chamber;
• a plurality of heating filaments extending in the vacuum chamber between opposing electrode regions at opposing wall regions of the vacuum chamber, wherein the heating filaments are electrically connected in parallel, and wherein the heating filaments and the electrode regions comprise a highly electrically conductive material;
• and
• an optical isolation structure outside the vacuum chamber and different and distinct from the insulating material,
• wherein the optical isolation structure is configured for optically confining IR radiation and for providing a predominant propagation direction of the IR radiation, and
• wherein the optical isolation structure is located within the sealed cavity structure.

An IR (infrared) radiation source comprising:

• a sealed cavity structure enclosing a vacuum chamber having a low atmospheric pressure, wherein the sealed cavity structure comprises a thermally and electrically insulating material enclosing the vacuum chamber;
• a plurality of heating filaments extending in the vacuum chamber between opposing electrode regions at opposing wall regions of the vacuum chamber, wherein the heating filaments are electrically connected in parallel, and wherein the heating filaments and the electrode regions comprise a highly electrically conductive material;
• and
• an optical isolation structure adjacent to the vacuum chamber, the optical isolation structure being configured for optically confining IR radiation and for providing a predominant propagation direction of the IR radiation,
• wherein the insulating material of the sealed cavity structure comprises a first insulating layer having a silicon nitride material enclosing the vacuum chamber of the sealed cavity structure, and
• wherein the insulating material of the sealed cavity structure further comprises a second insulating layer comprising a silicon dioxide material enclosing the first insulating layer.