Transducer, electronic device and transducer array
AssigneeRohm Co., Ltd.
InventorsTakashi Naiki, Kenji Goda
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Abstract
The present disclosure is related to a transducer. The transducer includes a substrate. A plurality of vibrating membranes, in a configuration of cantilevers, are disposed on a main surface of the substrate. A plurality of piezoelectric elements are stacked on the plurality of vibrating membranes for generating a voltage to excite each vibrating membrane. The cantilevers of the plurality of vibrating membranes extend in a direction from a reference point on the main surface toward the cantilevers, or in a direction from the cantilevers toward the reference point.
Claims20
A transducer, comprising:
- a substrate;
- a plurality of vibrating membranes, in a configuration of cantilevers, disposed on a main surface of the substrate,
- wherein one side of each of the vibrating membranes is connected to the main surface, and remaining sides are free of connection to any physical object;
- and
- a plurality of piezoelectric elements, having a rectangular shape in a plan view and stacked on the plurality of vibrating membranes for generating a voltage to excite each vibrating membrane, wherein
- the cantilevers of the plurality of vibrating membranes extend in a direction from a reference point on the main surface toward the cantilevers, or in a direction from the cantilevers toward the reference point, and
- longitudinal dimensions of the plurality of piezoelectric elements extend along the extending direction of the respective cantilevers.
A transducer array, comprising a plurality of transducers, each of the transducers includes:
- a substrate;
- a plurality of vibrating membranes in a configuration of cantilevers, disposed on a main surface of the substrate and extending in one direction within the main surface, wherein one side of each of the vibrating membranes is connected to the main surface, and remaining sides are free of connection to any physical object;
- and
- a plurality of piezoelectric elements, having a rectangular shape in a plan view and stacked on the plurality of vibrating membranes to excite each vibrating membrane, wherein
- the plurality of transducers are in a two-dimensional arrangement with their main surfaces facing a same side,
- the cantilevers of the plurality of transducers extend in a direction from a reference point in a plane including the two-dimensional arrangement toward the transducers, or in a direction from the transducers toward the reference point, and
- longitudinal dimensions of the plurality of piezoelectric elements extend along the extending direction of the respective cantilevers.
Dependencies are inferred from the claim text.