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US 12,732,678 B2Granted
Peltier module, assembly, and apparatus for mask inspection
AssigneeCarl Zeiss SMT GmbH
InventorLutz Brekerbohm
Life of this patent
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Abstract
The invention relates to a Peltier module, to an assembly and to an apparatus for mask inspection. A Peltier module according to the invention has a plurality of Peltier pellets, which are made of a semiconductor material and are arranged between a first plate forming a hot side and a second plate forming a cold side, wherein the first plate and the second plate are each made of a metallic material, and wherein a vacuum seal component is provided on the second plate.
Claims18
A Peltier module, comprising
- a plurality of Peltier pellets, which are made of a semiconductor material and are arranged between a first plate forming a hot side and a second plate forming a cold side;
- wherein the second plate is designed as a mounting interface for an image sensor or image sensor carrier;
- wherein the first plate and the second plate are each made of a metallic material;
- wherein a vacuum seal component is provided on the second plate;
- and
- wherein the second plate has at least one fastening hole for fastening the image sensor carrier to the second plate.
3 more elements
An assembly comprising
- a Peltier module having a plurality of Peltier pellets, which are made of a semiconductor material and are arranged between a first plate forming a hot side and a second plate forming a cold side, wherein the first plate and the second plate are each made of a metallic material;
- and
- an image sensor carrier and/or image sensor fastened to the second plate;
- wherein the second plate has at least one fastening hole for fastening the image sensor carrier to the second plate.
1 more element
Dependencies are inferred from the claim text.