System and method for distributed image recording and storage for charged particle systems
AssigneeASML Netherlands B.V.
InventorsMyunghoon Yoon, Wen-Ting Tai, Yunxiang Chai
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AssigneeASML Netherlands B.V.
InventorsMyunghoon Yoon, Wen-Ting Tai, Yunxiang Chai
Estimating the term…
Apparatuses, systems, and methods for distributed image recording and storage for charged particle tools are provided. In some embodiments, a system may include a first storage of a data center, the first storage configured to store a plurality of images acquired from a plurality of scanning charged particle microscope (SCPM) tools; an image hub server of the data center, the image hub server configured to: receive a first query from an application for a location of a first image generated by a first SCPM tool of the plurality of SCPM tools; determine that the location of the first image is the first storage; and transfer the first image from the first storage to the application for inspection analysis of the first image.
A system for distributed image recording and storage for charged particle tools, the system comprising:
A method for distributing image recording and storage for charged particle tools, the method comprising:
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a data hub to cause the data hub to perform a method for distributed image recording and storage for charged particle tools, the method comprising:
Dependencies are inferred from the claim text.