Reflective structure for surface acoustic wave devices (SAW)
AssigneeSoitec
InventorsSylvain Ballandras, Emilie Courjon, Florent Bernard, Thierry LaRoche, Julien Garcia, Alexandre Clairet
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AssigneeSoitec
InventorsSylvain Ballandras, Emilie Courjon, Florent Bernard, Thierry LaRoche, Julien Garcia, Alexandre Clairet
Estimating the term…
A surface acoustic wave (SAW) device comprises an interdigitated transducer structure and at least one acoustic wave reflective structure provided on or in an acoustic wave propagating substrate. The interdigitated transducer structure comprises a first material and the at least one acoustic wave reflective structure comprises a second material different from the first material and/or the acoustic wave reflective structure and the interdigitated transducer structure have different geometrical parameters. A sensor comprises a SAW device as described herein, and a method is used for manufacturing a SAW device comprising at least one acoustic wave reflective structure.
A surface acoustic wave (SAW) device, comprising:
A surface acoustic wave (SAW) device, comprising:
A surface acoustic wave (SAW) device, comprising:
Dependencies are inferred from the claim text.