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US 12,732,156 B2Granted
Composite substrate and method of producing composite substrate
AssigneeNGK Insulators, Ltd.
InventorYuji Hori
Life of this patent
Estimating the term…
Abstract
A composite substrate includes in this order: a support substrate; an intermediate layer; and a piezoelectric layer, wherein the intermediate layer contains bubbles.
Claims12
A composite substrate, comprising in this order:
- a support substrate;
- an intermediate layer;
- and
- a piezoelectric layer,
- wherein the intermediate layer contains bubbles,
- wherein the bubbles each have a bubble diameter of from 10 nm to 100 nm, and the bubble diameter is a long diameter of each of the bubbles, and
- wherein the intermediate layer has a piezoelectric layer facing region in which the bubbles are absent, and the piezoelectric layer facing region is formed in the entirety of a range of 200 nm or less from an interface between the intermediate layer and the piezoelectric layer.
4 more elements
A method of producing a composite substrate, comprising:
- forming a first layer on one side of a support substrate;
- forming a second layer on one side of a piezoelectric substrate;
- joining the first layer and the second layer to provide a joined layer;
- and
- forming bubbles in the joined layer to provide an intermediate layer;
- wherein the bubbles each have a bubble diameter of from 10 nm to 100 nm, and the bubble diameter is a long diameter of each of the bubbles, and
- wherein the intermediate layer has a piezoelectric substrate facing region in which the bubbles are absent, and the piezoelectric substrate facing region is formed in the entirety of a range of 200 nm or less from an interface between the intermediate layer and the piezoelectric substrate.
4 more elements
Dependencies are inferred from the claim text.