Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYasumasa Taniguchi, Hideki Iwamoto, Hiromu Okunaga
Life of this patent
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Abstract
In an acoustic wave device, a first IDT electrode is provided on a first main surface of a piezoelectric film, and a second IDT electrode is provided on a second main surface of the piezoelectric film. A crystal c-axis of the piezoelectric film is tilted with respect to a direction normal to the first and second main surfaces. A direction of an electric field generated between a busbar of a comb-shaped electrode and end portions of electrode fingers facing the busbar in the first IDT electrode and a direction of an electric field generated between a busbar and end portions of electrode fingers facing the busbar in the second IDT electrode are opposite directions.
Claims18
An acoustic wave device comprising:
- a piezoelectric film including first and second main surfaces facing each other;
- a first IDT electrode provided on the first main surface of the piezoelectric film;
- and
- a second IDT electrode provided on the second main surface of the piezoelectric film;
- wherein
- a crystal c-axis of the piezoelectric film is tilted with respect to a direction normal to the first and second main surfaces of the piezoelectric film;
- the first IDT electrode and the second IDT electrode at least partially face each other with the piezoelectric film interposed therebetween;
- each of the first and second IDT electrodes includes two comb-shaped electrodes interdigitated with each other, each of the comb-shaped electrodes including a plurality of electrode fingers and a busbar to which the plurality of electrode fingers are connected;
- a direction of an electric field generated between the busbar and end portions of the electrode fingers facing the busbar in the first IDT electrode and a direction of an electric field generated between the busbar and end portions of the electrode fingers facing the busbar in the second IDT electrode are opposite directions;
- the first IDT electrode includes first and second comb-shaped electrodes, the first comb-shaped electrode including a plurality of first electrode fingers and a first busbar to which the plurality of first electrode fingers are connected, the second comb-shaped electrode including a plurality of second electrode fingers and a second busbar to which the plurality of second electrode fingers are connected;
- the second IDT electrode includes third and fourth comb-shaped electrodes, the third comb-shaped electrode including a plurality of third electrode fingers and a third busbar to which the plurality of third electrode fingers are connected, the fourth comb-shaped electrode including a plurality of fourth electrode fingers and a fourth busbar to which the plurality of fourth electrode fingers are connected;
- and
- regarding an electrode finger of the first IDT electrode and an electrode finger of the second IDT electrode which overlap each other with the piezoelectric film interposed therebetween, a potential of the electrode finger of the first IDT electrode and a potential of the electrode finger of the second IDT electrode are the same potential.
Dependencies are inferred from the claim text.