Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakashi Yamane, Patrick Turner, Ventsislav Yantchev, Bryant Garcia, Robert B. Hammond
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTakashi Yamane, Patrick Turner, Ventsislav Yantchev, Bryant Garcia, Robert B. Hammond
Estimating the term…
An acoustic wave device is provided that includes a support substrate including top and bottom surfaces and a cavity or air gap, a piezoelectric layer supported by the support substrate and including top and bottom surfaces, and an electrode on a surface of the piezoelectric layer and including top and bottom surfaces. At least a portion of the electrode is over the cavity or the air gap, and an equation 0.002 Tg≤0.5(Lb−Ls)<Te is satisfied, where Ls is a maximum length of the top surface of the electrode, Lb is a maximum length of the bottom surface of the electrode, Tg is a distance between the top surface of the piezoelectric layer and the top surface of the support substrate, and Te is a thickness of the electrode.
An acoustic wave device comprising:
An acoustic wave device comprising:
Dependencies are inferred from the claim text.