Back to results
US 12,732,152 B2Granted
Piezoelectric thin film resonator
AssigneeMurata Manufacturing Co., Ltd.
InventorTetsuya Kimura
Life of this patent
Estimating the term…
Abstract
A piezoelectric thin film includes a piezoelectric element and a substrate supporting the piezoelectric element. The piezoelectric element includes a piezoelectric thin film and first and second electrodes opposing each other with the piezoelectric thin film interposed therebetween. The piezoelectric thin film has a first-electrode-side content of each of aluminum and scandium higher than a second-electrode-side content thereof and a first-electrode-side content of nitrogen lower than a second-electrode-side content thereof.
Claims15
A piezoelectric thin film resonator comprising:
- a piezoelectric thin film including aluminum nitride as a primary component and scandium;
- a first electrode;
- a second electrode opposing the first electrode with the piezoelectric thin film interposed therebetween;
- and
- a substrate supporting a piezoelectric element including the first electrode, the second electrode, and the piezoelectric thin film;
- wherein
- the piezoelectric thin film has a first-electrode-side content of each of scandium and aluminum higher than a second-electrode-side content of each of scandium and aluminum and a first-electrode-side content of nitrogen lower than a second-electrode-side content of nitrogen.
4 more elements
Dependencies are inferred from the claim text.