Substrate processing equipment and method of driving substrate processing equipment

A substrate processing equipment for processing a substrate, the substrate processing equipment comprising:

• a process processing module which is installed within a fab and includes a process chamber, a buffer unit, and a transfer chamber having loads utilized in a process of processing the substrate;
• a branch circuit breaker which is installed within the fab, is an Earth Leakage Circuit Breaker (ELB) or a Molded Case Circuit Breaker (MCCB), is installed on a periphery of the process processing module, and includes a plurality of branch circuit breakers, the plurality of branch circuit breakers being electrically connected to each of the loads in the process chamber, the buffer unit, and the transfer chamber;
• a main circuit breaker which is installed in a sub-fab on a different layer from the fab, is an ELB or an MCCB, includes an internal relay for energizing or de-energizing a first internal contact, is electrically connected to the branch circuit breaker, and supplies power to the branch circuit breaker;
• a power distribution board which is installed within the fab, installed on the periphery of the process processing module, includes the branch circuit breaker mounted therein, and includes a power distribution board door that is pivotable or slidable;
• a door open/close detection unit which is installed within the fab, is at least one of a magnetic sensor, a relay switch, and an object detection sensor, is installed on a periphery of the power distribution board door, and switches to a first contact state when the power distribution board door is opened and switches to a second contact state when the power distribution board door is closed;
• and
• a shunt unit which is installed within the sub-fab, includes a relay or a switching element, is electrically connected to the door open/close detection unit, and does not cut off the main circuit breaker to allow the main circuit breaker to be switched to a turn-off state when the door open/close detection unit is in the first contact state and to allow the main circuit breaker to be switched to a turn-on state when the door open/close detection unit is in the second contact state,
• wherein the door open/close detection unit has one end of a second internal contact that is electrically connected with an input terminal of the branch circuit breaker, and another end of the second internal contact that is electrically connected with the shunt unit,
• the first contact state is an energized state of an electrical connection between the input terminal of the branch circuit breaker and the shunt unit, and
• the second contact state is in a de-energized state of electrical connection between the input terminal of the branch circuit breaker and the shunt unit.

A substrate processing equipment for processing a substrate, the substrate processing equipment comprising:

• a process processing module including loads utilized in a process for processing the substrate;
• a branch circuit breaker installed on a periphery of the process processing module and electrically connected to the loads;
• a main circuit breaker electrically connected to the branch circuit breaker, the main circuit breaker configured to supply power to the branch circuit breaker;
• a power distribution board having the branch circuit breaker mounted therein, the power distribution board including a power distribution board door;
• a door detector configured to detect opening and closing of the power distribution board door;
• and
• a shunt unit configured to switch the main circuit breaker to a turn-off state responsive to detection by the door detector that the power distribution board door is open, and to enable the main circuit breaker to be switched to a turn-on state responsive to the detection by the door detector that the power distribution board door is open,
• wherein the door detector has an internal contact including a first end electrically connected to an input terminal of the branch circuit breaker, and a second end electrically connected to the shunt unit.