Elongated capacitors in 3D NAND memory devices
AssigneeMicron Technology, Inc.
InventorsYu-Chung Lien, Zhenming Zhou
Life of this patent
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AssigneeMicron Technology, Inc.
InventorsYu-Chung Lien, Zhenming Zhou
Estimating the term…
A semiconductor device can include a substrate of semiconductor material and multiple stacks of memory cells disposed within the substrate. Each of the stacks can include a conductive string that connects memory cells to a bitline where each memory cell is located at an intersection of the conductive string and a wordline. The device can also include capacitor having a cylindrical body disposed between two adjacent stacks of memory cells where the capacitor includes an inner conductive layer and an outer conductive layer at least partially surrounding the inner conductive layer, where the inner conductive layer and the outer conductive layer are separated by a dielectric layer. The device can further include a power supply line conductively connected to an end of the capacitor at a base of the cylindrical body.
A semiconductor device, comprising:
A semiconductor device, comprising:
A semiconductor device, comprising:
Dependencies are inferred from the claim text.