Verification for improving quality of maintenance of manufacturing equipment

A method comprising:

• initiating, by a server, a maintenance process of manufacturing equipment, the maintenance process comprising a plurality of maintenance stages that are associated with maintenance of one or more components of the manufacturing equipment;
• providing to a user device a first instruction indicating that a first maintenance stage of the plurality of maintenance stages is to be performed;
• causing, via the first instruction, the first maintenance stage to be performed;
• causing, via a second instruction, a second maintenance stage to be performed;
• receiving first data resulting from a first performance of the first maintenance stage, the first data comprising image or video data of the manufacturing equipment provided by the user device in connection with the first maintenance stage;
• receiving second data resulting from a first performance of the second maintenance stage, the second data provided by one or more tools communicatively connected to the server in connection with the second maintenance stage;
• determining that the first performance of the first maintenance stage or the first performance of the second maintenance stage was not satisfactory based on the first data or the second data;
• causing performance of a corrective action;
• responsive to obtaining an indication from the user device that the corrective action has been performed, providing a signal to activate one or more components of the manufacturing equipment to perform qualification operations in connection with the corrective action;
• determining, responsive to activating the one or more components of the manufacturing equipment and based on one or more sensor measurements of processing conditions of the manufacturing equipment associated with the one or more components of the manufacturing equipment, results of the qualification operations;
• and
• responsive to determining that the results of the qualification operations satisfy one or more criteria, causing a substrate to be processed using the manufacturing equipment.

A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:

• initiating, by a server, a maintenance process of manufacturing equipment, the maintenance process comprising a plurality of maintenance stages that are associated with maintenance of one or more components of the manufacturing equipment;
• providing to a user device a first instruction indicating that a first maintenance stage of the plurality of maintenance stages is to be performed;
• causing, via the first instruction, the first maintenance stage to be performed;
• causing, via a second instruction, a second maintenance stage to be performed;
• receiving first data resulting from a first performance of the first maintenance stage, the first data comprising image or video data of the manufacturing equipment provided by the user device in connection with the first maintenance stage;
• receiving second data resulting from a first performance of the second maintenance stage, the second data provided by one or more tools communicatively connected to the server in connection with the second maintenance stage;
• determining that the first performance of the first maintenance stage or the first performance of the second maintenance stage was not satisfactory based on the first data or the second data;
• causing performance of a corrective action;
• responsive to obtaining an indication from the user device that the corrective action has been performed, providing a signal to activate one or more components of the manufacturing equipment to perform qualification operations in connection with the corrective action;
• determining, responsive to activating the one or more components of the manufacturing equipment and based on one or more sensor measurements of processing conditions of the manufacturing equipment associated with the one or more components of the manufacturing equipment, results of the qualification operations;
• and
• responsive to determining that the results of the qualification operations satisfy one or more criteria, causing a substrate to be processed using the manufacturing equipment.