Gripper and lithographic apparatus comprising the gripper
AssigneeASML Netherlands B.V.
InventorsPaul Van Dongen, Aart Adrianus Van Beuzekom
Life of this patent
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Abstract
A gripper configured to transport a substrate in a lithographic apparatus, the gripper including: a main body with one or more engagement portions for engaging with a surface of the substrate, wherein a part of the main body, that is overlapped by a region of a substrate when the one or more engagement portions are engaged with the substrate, has a plurality of openings that extend through the main body in a direction substantially perpendicular to the surface of the substrate.
Claims21
A gripper configured to transport a substrate in a lithographic apparatus, the gripper comprising:
- a main body with one or more engagement portions for engaging with a major surface of the substrate, the one or more engagement portions all located fully within an outer peripheral edge of the substrate when the one or more engagement portions are engaged with the major surface of the substrate;
- wherein a part of the main body comprises a plurality of openings that extend through the main body in a direction substantially perpendicular to the surface of the substrate,
- wherein the openings are at least partly overlapped by an edge region of a substrate when the one or more engagement portions are engaged with the substrate, and
- wherein, when the one or more engagement portions are engaged with the major surface of the substrate, at least one of the openings is located, in a direction outward from a central portion of the main body, between 1) an engagement portion, of the one or more engagement portions, that is nearest the edge of the substrate and 2) the edge of the substrate.
A gripper configured to transport a substrate in a lithographic apparatus, the gripper comprising:
- a main body with one or more engagement portions for engaging with a surface of the substrate;
- wherein a part of the main body comprises:
- a plurality of openings that extend through the main body in a direction substantially perpendicular to the surface of the substrate and the plurality of openings are enclosed by a main body structure, and
- a plurality of ribs arranged to connect a first part of the enclosing main body structure with a second part of the enclosing main body structure,
- wherein at least one of the openings is arranged adjacent or between the ribs,
- wherein the openings and ribs are overlapped by an edge region of a substrate when the one or more engagement portions are engaged with the substrate, and
- wherein, when the one or more engagement portions are engaged with the major surface of the substrate, at least one of the openings is located, in a direction outward from a central portion of the main body, between 1) an engagement portion, of the one or more engagement portions, that is nearest the edge of the substrate and 2) the edge of the substrate.
A gripper configured to transport a substrate in a lithographic apparatus, the gripper comprising:
- a main body with one or more engagement portions for contacting with a major surface of the substrate such that there is a gap between the main body and the substrate when the one or more engagement portions are engaged with the substrate and the one or more engagement portions all located fully within an outer peripheral edge of the substrate when the one or more engagement portions are engaged with the substrate,
- wherein a part of the main body, that is at least partly overlapped by an edge region of the substrate when the one or more engagement portions are engaged with the substrate, comprises a plurality of openings that extend through the main body in a direction substantially perpendicular to the surface of the substrate, and
- wherein, when the one or more engagement portions are engaged with the major surface of the substrate, at least one of the openings is located, in a direction outward from a central portion of the main body, between 1) an engagement portion, of the one or more engagement portions, that is nearest the edge of the substrate and 2) the edge of the substrate.
Dependencies are inferred from the claim text.