Composition for forming organic film, patterning process, and compound and polymer for forming organic film

A polymer having a repeating unit shown by the following general formula (4),

• wherein R1 represents a hydrogen atom, an allyl group, or a propargyl group, R2 represents a nitro group, a halogen atom, a hydroxy group, an alkyloxy group having 1 to 4 carbon atoms, an alkynyloxy group having 2 to 4 carbon atoms, an alkenyloxy group having 2 to 4 carbon atoms, a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms, a trifluoromethyl group, or a trifluoromethyloxy group, R3 represents an alkyl group having 1 to 4 carbon atoms, an alkynyl group having 2 to 4 carbon atoms, or an alkenyl group having 2 to 4 carbon atoms, “m” represents 0 or 1, “n” represents an integer of 1 or 2, “l” represents 0 or 1, aromatic rings forming a cyclic ether structure with one another when l=1, “k” represents an integer of 0 to 2, and L represents a divalent organic group having 1 to 40 carbon atoms.

A compound shown by the following general formula (1),

• wherein R1 represents a hydrogen atom, an allyl group, or a propargyl group, R2 represents a nitro group, a halogen atom, a hydroxy group, an alkyloxy group having 1 to 4 carbon atoms, an alkynyloxy group having 2 to 4 carbon atoms, an alkenyloxy group having 2 to 4 carbon atoms, a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms, a trifluoromethyl group, or a trifluoromethyloxy group, R3 represents, an alkyl group having 1 to 4 carbon atoms, an alkynyl group having 2 to 4 carbon atoms, or an alkenyl group having 2 to 4 carbon atoms, “m” represents 0 or 1, “n” represents an integer of 1 or 2, “l” represents 0 or 1, aromatic rings forming a cyclic ether structure with one another when l=1, “k” represents an integer of 0 to 2.

A compound shown by the following general formula (2),

• wherein R4 represents a hydrogen atom, an allyl group, or a propargyl group, R5 represents a nitro group, a halogen atom, a hydroxy group, an alkyloxy group having 1 to 4 carbon atoms, an alkynyloxy group having 2 to 4 carbon atoms, an alkenyloxy group having 2 to 4 carbon atoms, a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms, a trifluoromethyl group, or a trifluoromethyloxy group, R6 represents an alkyl group having 1 to 4 carbon atoms, an alkynyl group having 2 to 4 carbon atoms, or an alkenyl group having 2 to 4 carbon atoms, “i” represents 0 or 1, “q” represents an integer of 0 to 2, “h” and “j” each independently represent an integer of 0 to 2 and satisfy the relationship 1≤h+j≤4, “r” represents 0 or 1, aromatic rings forming a cyclic ether structure with one another when r=1, and W represents any divalent group shown by the following formulae (3),
• wherein a broken line represents an attachment point, and
• wherein the compound shown by the general formula (1) and/or (2) satisfies 1.00≤Mw/Mn≤1.10, where Mw is a weight-average molecular weight and Mn is a number-average molecular weight measured by gel permeation chromatography in terms of polystyrene.

A polymer having a repeating unit shown by the following general formula (5),

• wherein R4 represents a hydrogen atom, an allyl group, or a propargyl group, R5 represents a nitro group, a halogen atom, a hydroxy group, an alkyloxy group having 1 to 4 carbon atoms, an alkynyloxy group having 2 to 4 carbon atoms, an alkenyloxy group having 2 to 4 carbon atoms, a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms, a trifluoromethyl group, or a trifluoromethyloxy group, R6 represents an alkyl group having 1 to 4 carbon atoms, an alkynyl group having 2 to 4 carbon atoms, or an alkenyl group having 2 to 4 carbon atoms, “i” represents 0 or 1, “q” represents an integer of 0 to 2, “h” and “j” each independently represent an integer of 0 to 2 and satisfy the relationship 1≤h+j≤4, “r” represents 0 or 1, aromatic rings forming a cyclic ether structure with one another when r=1, W represents a single bond or any divalent group shown by the following formulae (3), and L represents a divalent organic group having 1 to 40 carbon atoms,
• wherein a broken line represents an attachment point.