Optical filtering device, method of controlling optical filtering device, and MEMS shutter

An optical filtering device comprising:

• a shutter openable and closeable by voltage control;
• and
• a substrate having a shutter opening serving as a movable range of the shutter,
• wherein:
• the substrate includes a sticking prevention part configured to prevent the shutter from sticking to a wall surface of the shutter opening when the shutter is opened;
• the sticking prevention part is a protrusion disposed on the wall surface of the shutter opening;
• the protrusion is disposed to extend over the entire of a thickness direction of the substrate;
• and
• any cross section in the thickness direction of the substrate has an approximately same shape.