US 12,730,256 B2 · Methods to reduce optical loss of an AR waveguide

Abstract

Methods for modifying the interface of optical substrates. To achieve desirable optical properties, surface defects need to be removed from the interface layer. In one example, a substrate is exposed to an ion beam then a high temperature bake or laser annealing to correct the interface layer. In another example, a high energy ion beam can be used to remove the interface layer then a new interface layer can be added during a high temperature bake or laser annealing with a protective layer added last. If not removed surface defects in the interface layer may absorb a percentage of light in a single interaction. In a waveguide, light may bounce ten to hundreds of times inside a substrate causing significant light loss. Therefore, removing the surface defects significantly increases waveguide efficiency.

Claims19

Dependent claims

A method of fabricating a waveguide, comprising:

exposing a first interface layer of an optical device substrate to an ion beam, the first interface layer having a crystalline structure and exposing the first interface layer to the ion beam modifies the crystalline structure of the first interface layer, the optical device substrate comprising silicon carbide (SiC) containing materials, lithium niobate (LiNbO3) containing materials, diamond (C) containing materials, metal oxide containing materials, or combinations thereof, the first interface layer is disposed on a first surface of the optical device substrate;
and
subjecting the optical device substrate to a bake process or an anneal process, wherein the bake process or the anneal process recrystallizes the first interface layer, removes impurities from the first interface layer, or forms a second interface layer on the first surface of the optical device substrate.

Dependencies are inferred from the claim text.

Methods to reduce optical loss of an AR waveguide

Life of this patent

Methods to reduce optical loss of an AR waveguide

Life of this patent

Abstract

Claims19