Probe systems and methods of operating probe systems

A probe system, comprising:

• a chuck that defines a support surface configured to support a substrate that includes a device under test;
• a cover plate that defines a chuck-facing side, which faces toward the support surface, and a chuck-opposed side, which faces away from the support surface;
• a probe positioner that includes a positioner base, a manipulator that extends from the positioner base, and a probe arm that extends from the manipulator;
• a probe operatively attached to the probe arm;
• and
• a positioner attachment structure that separably attaches the positioner base to the cover plate, wherein the positioner attachment structure includes an attachment structure body that defines a positioner base-facing side and a cover plate-facing side, wherein the positioner attachment structure further includes an adhesive material that adheres the positioner base-facing side to the positioner base, and further wherein the cover plate-facing side of the attachment structure body defines a micropatterned dry adhesive that separably attaches the attachment structure body to the cover plate.