Non-destructive in-situ measurement device and method for high-complexity structures based on Raman analysis

A non-destructive in-situ measurement method for high-complexity structures based on Raman analysis, wherein it is applied to a non-destructive in-situ measurement device for high-complexity structures based on Raman analysis, characterized by its use for measuring structural parameters of a structure under test within a sample under test, the device comprising:

• a laser light source, wherein the laser light source is configured to emit a laser beam;
• a focusing component, wherein the focusing component is configured to converge the laser beam, focusing it above a movable sample stage and position a focal plane of the focusing component at an initial position, and during a measurement process, the focal plane is controlled to move from the initial position to at least a bottom surface of the structure under test;
• the movable sample stage, wherein the movable sample stage holds the sample under test and is configured to move in a plane perpendicular and/or parallel to an optical axis of the focusing component, wherein an axis of the structure under test is parallel to the optical axis and is located within a focal region of the laser beam;
• and
• a detection module, wherein the detection module collects specific Raman scattering signals returned from the sample under test after scattering the laser beam, and the structural parameters of the structure under test are determined based on collected results,
• the method comprising:
• fixing the sample under test to the movable sample stage, and ensuring that an axial direction of the structure under test within the sample is parallel to the optical axis of the focusing component;
• controlling the laser light source to emit the laser beam towards the sample under test;
• controlling the focusing component such that the focal plane of the focusing component is at the initial position above the movable sample stage;
• controlling the movable sample stage to move in a plane perpendicular to the optical axis, such that a position of the structure under test coincides with the focal region of the laser beam;
• during the measurement, controlling the focusing component to move the focal plane from the initial position to at least the bottom surface of the structure under test;
• controlling the detection module to collect the specific Raman scattering signals returned after scattering of the laser beam by the sample under test, and determining the structural parameters of the structure under test based on the collected results,
• wherein the determination of the structural parameters of the structure under test based on the collected results comprises:
• determining a scanning curve corresponding to the focal plane based on a signal intensity of each collected result and a first distance moved by the focal plane towards the movable sample stage;
• determining multiple feature points on the scanning curve and the corresponding first distance for each feature point;
• and
• determining the structural parameters of the structure under test based on a Raman scattering model and/or a reference sample database corresponding to the structure under test, the feature points, and the corresponding first distances;
• wherein the Raman scattering model is created based on reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test;
• and
• wherein parameters in the reference sample database are determined based on the reflection and/or scattering Raman signal patterns of the laser beam for a structure matching the structure under test.